2/15/2010	10:40:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2010	10:40:16 AM	H2 valve closed
2/15/2010	10:40:16 AM	BCl3 valve closed
2/15/2010	10:40:16 AM	PH3 valve closed
2/15/2010	10:40:16 AM	SiCl4 pre valve closed
2/15/2010	10:40:16 AM	SiCl4 post valve closed
2/15/2010	10:40:16 AM	Main Vac valve closed
2/15/2010	10:40:16 AM	Bypass valve closed
2/15/2010	10:40:16 AM	Bubbler valve closed
2/15/2010	10:40:16 AM	Helium valve opened
2/15/2010	10:40:16 AM	Helium MFC set to  500.000000
2/15/2010	10:40:16 AM	H2 MFC set to  0.000000
2/15/2010	10:40:16 AM	BCl3 MFC set to  0.000000
2/15/2010	10:40:16 AM	SiCl4 MFC set to  0.000000
2/15/2010	10:40:16 AM	Bypass solenoid MFC set to  0.000000
2/15/2010	10:40:16 AM	Tube furnace set to 0
2/15/2010	10:40:16 AM	Bypass solenoid MFC set to  0.000000
2/15/2010	10:41:39 AM	Helium valve closed
2/15/2010	10:41:39 AM	H2 valve closed
2/15/2010	10:41:39 AM	BCl3 valve closed
2/15/2010	10:41:39 AM	PH3 valve closed
2/15/2010	10:41:39 AM	SiCl4 pre valve closed
2/15/2010	10:41:39 AM	SiCl4 post valve closed
2/15/2010	10:41:39 AM	Main Vac valve closed
2/15/2010	10:41:39 AM	Bypass valve closed
2/15/2010	10:41:39 AM	Bubbler valve closed
2/15/2010	10:41:39 AM	Helium MFC set to  0.000000
2/15/2010	10:41:39 AM	H2 MFC set to  0.000000
2/15/2010	10:41:39 AM	BCl3 MFC set to  0.000000
2/15/2010	10:41:39 AM	SiCl4 MFC set to  0.000000
2/15/2010	10:41:39 AM	Bypass solenoid MFC set to  0.000000
2/15/2010	10:41:39 AM	Tube furnace set to 0
2/15/2010	10:41:39 AM	Bypass solenoid MFC set to  0.000000
2/15/2010	10:41:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2010	10:49:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	10:49:55 AM	Helium valve closed
2/15/2010	10:49:55 AM	H2 valve closed
2/15/2010	10:49:55 AM	BCl3 valve closed
2/15/2010	10:49:55 AM	PH3 valve closed
2/15/2010	10:49:55 AM	SiCl4 pre valve closed
2/15/2010	10:49:55 AM	SiCl4 post valve closed
2/15/2010	10:49:55 AM	Main Vac valve closed
2/15/2010	10:49:55 AM	Bubbler valve closed
2/15/2010	10:49:55 AM	Bypass valve opened
2/15/2010	10:49:55 AM	Helium MFC set to  0.000000
2/15/2010	10:49:55 AM	H2 MFC set to  0.000000
2/15/2010	10:49:55 AM	BCl3 MFC set to  0.000000
2/15/2010	10:49:55 AM	SiCl4 MFC set to  0.000000
2/15/2010	10:49:55 AM	Bypass solenoid MFC set to  0.000000
2/15/2010	10:49:55 AM	Tube furnace set to 0
2/15/2010	10:49:55 AM	Bypass solenoid MFC set to  0.000000
2/15/2010	10:50:23 AM	Helium valve closed
2/15/2010	10:50:23 AM	H2 valve closed
2/15/2010	10:50:23 AM	BCl3 valve closed
2/15/2010	10:50:23 AM	PH3 valve closed
2/15/2010	10:50:23 AM	SiCl4 pre valve closed
2/15/2010	10:50:23 AM	SiCl4 post valve closed
2/15/2010	10:50:23 AM	Bubbler valve closed
2/15/2010	10:50:23 AM	Main Vac valve opened
2/15/2010	10:50:23 AM	Bypass valve opened
2/15/2010	10:50:23 AM	Helium MFC set to  0.000000
2/15/2010	10:50:23 AM	H2 MFC set to  0.000000
2/15/2010	10:50:23 AM	BCl3 MFC set to  0.000000
2/15/2010	10:50:23 AM	SiCl4 MFC set to  0.000000
2/15/2010	10:50:23 AM	Bypass solenoid MFC set to  0.000000
2/15/2010	10:50:23 AM	Tube furnace set to 0
2/15/2010	10:50:23 AM	Bypass solenoid MFC set to  0.000000
2/15/2010	10:50:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	11:41:30 AM	Main Vac valve closed
2/15/2010	11:41:31 AM	Bypass valve closed
2/15/2010	11:42:02 AM	Bypass valve opened
2/15/2010	11:42:03 AM	Main Vac valve opened
2/15/2010	11:44:38 AM	Recipe started at 11:44 AM
2/15/2010	11:44:38 AM	Helium valve closed
2/15/2010	11:44:38 AM	BCl3 valve closed
2/15/2010	11:44:38 AM	PH3 valve closed
2/15/2010	11:44:38 AM	SiCl4 pre valve closed
2/15/2010	11:44:38 AM	SiCl4 post valve closed
2/15/2010	11:44:38 AM	Main Vac valve closed
2/15/2010	11:44:38 AM	Bypass valve closed
2/15/2010	11:44:38 AM	Bubbler valve closed
2/15/2010	11:44:38 AM	H2 valve opened
2/15/2010	11:44:38 AM	Helium MFC set to  0.000000
2/15/2010	11:44:38 AM	H2 MFC set to  500.000000
2/15/2010	11:44:38 AM	BCl3 MFC set to  0.000000
2/15/2010	11:44:38 AM	SiCl4 MFC set to  0.000000
2/15/2010	11:44:38 AM	Bypass solenoid MFC set to  0.000000
2/15/2010	11:44:38 AM	Tube furnace set to 0
2/15/2010	11:44:38 AM	Bypass solenoid MFC set to  0.000000
2/15/2010	11:46:00 AM	Helium valve closed
2/15/2010	11:46:00 AM	BCl3 valve closed
2/15/2010	11:46:00 AM	PH3 valve closed
2/15/2010	11:46:00 AM	SiCl4 pre valve closed
2/15/2010	11:46:00 AM	SiCl4 post valve closed
2/15/2010	11:46:00 AM	Main Vac valve closed
2/15/2010	11:46:00 AM	Bypass valve closed
2/15/2010	11:46:00 AM	H2 valve opened
2/15/2010	11:46:00 AM	Bubbler valve opened
2/15/2010	11:46:00 AM	Helium MFC set to  0.000000
2/15/2010	11:46:00 AM	H2 MFC set to  500.000000
2/15/2010	11:46:00 AM	BCl3 MFC set to  0.000000
2/15/2010	11:46:00 AM	SiCl4 MFC set to  0.000000
2/15/2010	11:46:00 AM	Bypass solenoid MFC set to  0.000000
2/15/2010	11:46:00 AM	Tube furnace set to 0
2/15/2010	11:46:00 AM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:06:00 PM	Helium valve closed
2/15/2010	12:06:00 PM	BCl3 valve closed
2/15/2010	12:06:00 PM	PH3 valve closed
2/15/2010	12:06:00 PM	Main Vac valve closed
2/15/2010	12:06:00 PM	Bypass valve closed
2/15/2010	12:06:00 PM	H2 valve opened
2/15/2010	12:06:00 PM	SiCl4 pre valve opened
2/15/2010	12:06:00 PM	SiCl4 post valve opened
2/15/2010	12:06:00 PM	Bubbler valve opened
2/15/2010	12:06:00 PM	Helium MFC set to  0.000000
2/15/2010	12:06:00 PM	H2 MFC set to  500.000000
2/15/2010	12:06:00 PM	BCl3 MFC set to  0.000000
2/15/2010	12:06:00 PM	SiCl4 MFC set to  325.000000
2/15/2010	12:06:00 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:06:00 PM	Tube furnace set to 0
2/15/2010	12:06:00 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:26:01 PM	H2 valve closed
2/15/2010	12:26:01 PM	BCl3 valve closed
2/15/2010	12:26:01 PM	PH3 valve closed
2/15/2010	12:26:01 PM	SiCl4 pre valve closed
2/15/2010	12:26:01 PM	SiCl4 post valve closed
2/15/2010	12:26:01 PM	Main Vac valve closed
2/15/2010	12:26:01 PM	Bypass valve closed
2/15/2010	12:26:01 PM	Helium valve opened
2/15/2010	12:26:01 PM	Bubbler valve opened
2/15/2010	12:26:01 PM	Helium MFC set to  500.000000
2/15/2010	12:26:01 PM	H2 MFC set to  0.000000
2/15/2010	12:26:01 PM	BCl3 MFC set to  0.000000
2/15/2010	12:26:01 PM	SiCl4 MFC set to  0.000000
2/15/2010	12:26:01 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:26:01 PM	Tube furnace set to 0
2/15/2010	12:26:01 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:46:01 PM	Helium valve closed
2/15/2010	12:46:01 PM	H2 valve closed
2/15/2010	12:46:01 PM	BCl3 valve closed
2/15/2010	12:46:01 PM	PH3 valve closed
2/15/2010	12:46:01 PM	SiCl4 pre valve closed
2/15/2010	12:46:01 PM	SiCl4 post valve closed
2/15/2010	12:46:01 PM	Main Vac valve closed
2/15/2010	12:46:01 PM	Bypass valve closed
2/15/2010	12:46:01 PM	Bubbler valve closed
2/15/2010	12:46:01 PM	Helium MFC set to  0.000000
2/15/2010	12:46:01 PM	H2 MFC set to  0.000000
2/15/2010	12:46:01 PM	BCl3 MFC set to  0.000000
2/15/2010	12:46:01 PM	SiCl4 MFC set to  0.000000
2/15/2010	12:46:01 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:46:01 PM	Tube furnace set to 0
2/15/2010	12:46:01 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:46:01 PM	Run finished at 12:46 PM
2/15/2010	12:48:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2010	12:48:04 PM	H2 valve closed
2/15/2010	12:48:04 PM	BCl3 valve closed
2/15/2010	12:48:04 PM	PH3 valve closed
2/15/2010	12:48:04 PM	SiCl4 pre valve closed
2/15/2010	12:48:04 PM	SiCl4 post valve closed
2/15/2010	12:48:04 PM	Main Vac valve closed
2/15/2010	12:48:04 PM	Bypass valve closed
2/15/2010	12:48:04 PM	Bubbler valve closed
2/15/2010	12:48:04 PM	Helium valve opened
2/15/2010	12:48:04 PM	Helium MFC set to  500.000000
2/15/2010	12:48:04 PM	H2 MFC set to  0.000000
2/15/2010	12:48:04 PM	BCl3 MFC set to  0.000000
2/15/2010	12:48:04 PM	SiCl4 MFC set to  0.000000
2/15/2010	12:48:04 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:48:04 PM	Tube furnace set to 0
2/15/2010	12:48:04 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:48:05 PM	Helium valve closed
2/15/2010	12:48:05 PM	H2 valve closed
2/15/2010	12:48:05 PM	BCl3 valve closed
2/15/2010	12:48:05 PM	PH3 valve closed
2/15/2010	12:48:05 PM	SiCl4 pre valve closed
2/15/2010	12:48:05 PM	SiCl4 post valve closed
2/15/2010	12:48:05 PM	Main Vac valve closed
2/15/2010	12:48:05 PM	Bypass valve closed
2/15/2010	12:48:05 PM	Bubbler valve closed
2/15/2010	12:48:05 PM	Helium MFC set to  0.000000
2/15/2010	12:48:05 PM	H2 MFC set to  0.000000
2/15/2010	12:48:05 PM	BCl3 MFC set to  0.000000
2/15/2010	12:48:05 PM	SiCl4 MFC set to  0.000000
2/15/2010	12:48:05 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:48:05 PM	Tube furnace set to 0
2/15/2010	12:48:05 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:48:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2010	12:54:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	12:54:27 PM	Helium valve closed
2/15/2010	12:54:27 PM	H2 valve closed
2/15/2010	12:54:27 PM	BCl3 valve closed
2/15/2010	12:54:27 PM	PH3 valve closed
2/15/2010	12:54:27 PM	SiCl4 pre valve closed
2/15/2010	12:54:27 PM	SiCl4 post valve closed
2/15/2010	12:54:27 PM	Main Vac valve closed
2/15/2010	12:54:27 PM	Bubbler valve closed
2/15/2010	12:54:27 PM	Bypass valve opened
2/15/2010	12:54:27 PM	Helium MFC set to  0.000000
2/15/2010	12:54:27 PM	H2 MFC set to  0.000000
2/15/2010	12:54:27 PM	BCl3 MFC set to  0.000000
2/15/2010	12:54:27 PM	SiCl4 MFC set to  0.000000
2/15/2010	12:54:27 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:54:27 PM	Tube furnace set to 0
2/15/2010	12:54:27 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:54:56 PM	Helium valve closed
2/15/2010	12:54:56 PM	H2 valve closed
2/15/2010	12:54:56 PM	BCl3 valve closed
2/15/2010	12:54:56 PM	PH3 valve closed
2/15/2010	12:54:56 PM	SiCl4 pre valve closed
2/15/2010	12:54:56 PM	SiCl4 post valve closed
2/15/2010	12:54:56 PM	Bubbler valve closed
2/15/2010	12:54:56 PM	Main Vac valve opened
2/15/2010	12:54:56 PM	Bypass valve opened
2/15/2010	12:54:56 PM	Helium MFC set to  0.000000
2/15/2010	12:54:56 PM	H2 MFC set to  0.000000
2/15/2010	12:54:56 PM	BCl3 MFC set to  0.000000
2/15/2010	12:54:56 PM	SiCl4 MFC set to  0.000000
2/15/2010	12:54:56 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:54:56 PM	Tube furnace set to 0
2/15/2010	12:54:56 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	12:54:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	1:16:32 PM	Main Vac valve closed
2/15/2010	1:16:34 PM	Bypass valve closed
2/15/2010	1:17:04 PM	Bypass valve opened
2/15/2010	1:17:05 PM	Main Vac valve opened
2/15/2010	1:21:09 PM	Recipe started at 1:21 PM
2/15/2010	1:21:09 PM	Helium valve closed
2/15/2010	1:21:09 PM	BCl3 valve closed
2/15/2010	1:21:09 PM	PH3 valve closed
2/15/2010	1:21:09 PM	SiCl4 pre valve closed
2/15/2010	1:21:09 PM	SiCl4 post valve closed
2/15/2010	1:21:09 PM	Main Vac valve closed
2/15/2010	1:21:09 PM	Bypass valve closed
2/15/2010	1:21:09 PM	Bubbler valve closed
2/15/2010	1:21:09 PM	H2 valve opened
2/15/2010	1:21:09 PM	Helium MFC set to  0.000000
2/15/2010	1:21:09 PM	H2 MFC set to  500.000000
2/15/2010	1:21:09 PM	BCl3 MFC set to  0.000000
2/15/2010	1:21:09 PM	SiCl4 MFC set to  0.000000
2/15/2010	1:21:09 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	1:21:09 PM	Tube furnace set to 0
2/15/2010	1:21:09 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	1:22:30 PM	Helium valve closed
2/15/2010	1:22:30 PM	BCl3 valve closed
2/15/2010	1:22:30 PM	PH3 valve closed
2/15/2010	1:22:30 PM	SiCl4 pre valve closed
2/15/2010	1:22:30 PM	SiCl4 post valve closed
2/15/2010	1:22:30 PM	Main Vac valve closed
2/15/2010	1:22:30 PM	Bypass valve closed
2/15/2010	1:22:30 PM	H2 valve opened
2/15/2010	1:22:30 PM	Bubbler valve opened
2/15/2010	1:22:30 PM	Helium MFC set to  0.000000
2/15/2010	1:22:30 PM	H2 MFC set to  500.000000
2/15/2010	1:22:30 PM	BCl3 MFC set to  0.000000
2/15/2010	1:22:30 PM	SiCl4 MFC set to  0.000000
2/15/2010	1:22:30 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	1:22:30 PM	Tube furnace set to 0
2/15/2010	1:22:30 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	1:42:30 PM	Helium valve closed
2/15/2010	1:42:30 PM	BCl3 valve closed
2/15/2010	1:42:30 PM	PH3 valve closed
2/15/2010	1:42:30 PM	Main Vac valve closed
2/15/2010	1:42:30 PM	Bypass valve closed
2/15/2010	1:42:30 PM	H2 valve opened
2/15/2010	1:42:30 PM	SiCl4 pre valve opened
2/15/2010	1:42:30 PM	SiCl4 post valve opened
2/15/2010	1:42:30 PM	Bubbler valve opened
2/15/2010	1:42:30 PM	Helium MFC set to  0.000000
2/15/2010	1:42:30 PM	H2 MFC set to  500.000000
2/15/2010	1:42:30 PM	BCl3 MFC set to  0.000000
2/15/2010	1:42:30 PM	SiCl4 MFC set to  325.000000
2/15/2010	1:42:30 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	1:42:30 PM	Tube furnace set to 0
2/15/2010	1:42:30 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:02:31 PM	H2 valve closed
2/15/2010	2:02:31 PM	BCl3 valve closed
2/15/2010	2:02:31 PM	PH3 valve closed
2/15/2010	2:02:31 PM	SiCl4 pre valve closed
2/15/2010	2:02:31 PM	SiCl4 post valve closed
2/15/2010	2:02:31 PM	Main Vac valve closed
2/15/2010	2:02:31 PM	Bypass valve closed
2/15/2010	2:02:31 PM	Helium valve opened
2/15/2010	2:02:31 PM	Bubbler valve opened
2/15/2010	2:02:31 PM	Helium MFC set to  500.000000
2/15/2010	2:02:31 PM	H2 MFC set to  0.000000
2/15/2010	2:02:31 PM	BCl3 MFC set to  0.000000
2/15/2010	2:02:31 PM	SiCl4 MFC set to  0.000000
2/15/2010	2:02:31 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:02:31 PM	Tube furnace set to 0
2/15/2010	2:02:31 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:22:31 PM	Helium valve closed
2/15/2010	2:22:31 PM	H2 valve closed
2/15/2010	2:22:31 PM	BCl3 valve closed
2/15/2010	2:22:31 PM	PH3 valve closed
2/15/2010	2:22:31 PM	SiCl4 pre valve closed
2/15/2010	2:22:31 PM	SiCl4 post valve closed
2/15/2010	2:22:31 PM	Main Vac valve closed
2/15/2010	2:22:31 PM	Bypass valve closed
2/15/2010	2:22:31 PM	Bubbler valve closed
2/15/2010	2:22:31 PM	Helium MFC set to  0.000000
2/15/2010	2:22:31 PM	H2 MFC set to  0.000000
2/15/2010	2:22:31 PM	BCl3 MFC set to  0.000000
2/15/2010	2:22:31 PM	SiCl4 MFC set to  0.000000
2/15/2010	2:22:31 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:22:31 PM	Tube furnace set to 0
2/15/2010	2:22:31 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:22:31 PM	Run finished at 2:22 PM
2/15/2010	2:22:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2010	2:22:56 PM	H2 valve closed
2/15/2010	2:22:56 PM	BCl3 valve closed
2/15/2010	2:22:56 PM	PH3 valve closed
2/15/2010	2:22:56 PM	SiCl4 pre valve closed
2/15/2010	2:22:56 PM	SiCl4 post valve closed
2/15/2010	2:22:56 PM	Main Vac valve closed
2/15/2010	2:22:56 PM	Bypass valve closed
2/15/2010	2:22:56 PM	Bubbler valve closed
2/15/2010	2:22:56 PM	Helium valve opened
2/15/2010	2:22:56 PM	Helium MFC set to  500.000000
2/15/2010	2:22:56 PM	H2 MFC set to  0.000000
2/15/2010	2:22:56 PM	BCl3 MFC set to  0.000000
2/15/2010	2:22:56 PM	SiCl4 MFC set to  0.000000
2/15/2010	2:22:56 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:22:56 PM	Tube furnace set to 0
2/15/2010	2:22:56 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:22:56 PM	Helium valve closed
2/15/2010	2:22:56 PM	H2 valve closed
2/15/2010	2:22:56 PM	BCl3 valve closed
2/15/2010	2:22:56 PM	PH3 valve closed
2/15/2010	2:22:56 PM	SiCl4 pre valve closed
2/15/2010	2:22:56 PM	SiCl4 post valve closed
2/15/2010	2:22:56 PM	Main Vac valve closed
2/15/2010	2:22:56 PM	Bypass valve closed
2/15/2010	2:22:56 PM	Bubbler valve closed
2/15/2010	2:22:56 PM	Helium MFC set to  0.000000
2/15/2010	2:22:57 PM	H2 MFC set to  0.000000
2/15/2010	2:22:57 PM	BCl3 MFC set to  0.000000
2/15/2010	2:22:57 PM	SiCl4 MFC set to  0.000000
2/15/2010	2:22:57 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:22:57 PM	Tube furnace set to 0
2/15/2010	2:22:57 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:22:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2010	2:39:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	2:39:28 PM	Helium valve closed
2/15/2010	2:39:28 PM	H2 valve closed
2/15/2010	2:39:28 PM	BCl3 valve closed
2/15/2010	2:39:28 PM	PH3 valve closed
2/15/2010	2:39:28 PM	SiCl4 pre valve closed
2/15/2010	2:39:28 PM	SiCl4 post valve closed
2/15/2010	2:39:28 PM	Main Vac valve closed
2/15/2010	2:39:28 PM	Bubbler valve closed
2/15/2010	2:39:28 PM	Bypass valve opened
2/15/2010	2:39:28 PM	Helium MFC set to  0.000000
2/15/2010	2:39:28 PM	H2 MFC set to  0.000000
2/15/2010	2:39:28 PM	BCl3 MFC set to  0.000000
2/15/2010	2:39:28 PM	SiCl4 MFC set to  0.000000
2/15/2010	2:39:28 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:39:28 PM	Tube furnace set to 0
2/15/2010	2:39:28 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:39:57 PM	Helium valve closed
2/15/2010	2:39:57 PM	H2 valve closed
2/15/2010	2:39:57 PM	BCl3 valve closed
2/15/2010	2:39:57 PM	PH3 valve closed
2/15/2010	2:39:57 PM	SiCl4 pre valve closed
2/15/2010	2:39:57 PM	SiCl4 post valve closed
2/15/2010	2:39:57 PM	Bubbler valve closed
2/15/2010	2:39:57 PM	Main Vac valve opened
2/15/2010	2:39:57 PM	Bypass valve opened
2/15/2010	2:39:57 PM	Helium MFC set to  0.000000
2/15/2010	2:39:57 PM	H2 MFC set to  0.000000
2/15/2010	2:39:57 PM	BCl3 MFC set to  0.000000
2/15/2010	2:39:57 PM	SiCl4 MFC set to  0.000000
2/15/2010	2:39:57 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:39:57 PM	Tube furnace set to 0
2/15/2010	2:39:57 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:39:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	2:48:53 PM	Helium MFC set to  100.000000
2/15/2010	2:48:54 PM	Helium valve opened
2/15/2010	2:49:36 PM	Helium MFC set to  0.000000
2/15/2010	2:49:37 PM	Helium valve closed
2/15/2010	2:51:15 PM	Main Vac valve closed
2/15/2010	2:51:17 PM	Bypass valve closed
2/15/2010	2:51:31 PM	Bypass valve opened
2/15/2010	2:51:33 PM	Main Vac valve opened
2/15/2010	2:52:47 PM	Recipe started at 2:52 PM
2/15/2010	2:52:47 PM	Helium valve closed
2/15/2010	2:52:47 PM	BCl3 valve closed
2/15/2010	2:52:47 PM	PH3 valve closed
2/15/2010	2:52:47 PM	SiCl4 pre valve closed
2/15/2010	2:52:47 PM	SiCl4 post valve closed
2/15/2010	2:52:47 PM	Main Vac valve closed
2/15/2010	2:52:47 PM	Bypass valve closed
2/15/2010	2:52:47 PM	Bubbler valve closed
2/15/2010	2:52:47 PM	H2 valve opened
2/15/2010	2:52:47 PM	Helium MFC set to  0.000000
2/15/2010	2:52:47 PM	H2 MFC set to  500.000000
2/15/2010	2:52:47 PM	BCl3 MFC set to  0.000000
2/15/2010	2:52:47 PM	SiCl4 MFC set to  0.000000
2/15/2010	2:52:47 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:52:47 PM	Tube furnace set to 0
2/15/2010	2:52:47 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:54:09 PM	Helium valve closed
2/15/2010	2:54:09 PM	BCl3 valve closed
2/15/2010	2:54:09 PM	PH3 valve closed
2/15/2010	2:54:09 PM	SiCl4 pre valve closed
2/15/2010	2:54:09 PM	SiCl4 post valve closed
2/15/2010	2:54:09 PM	Main Vac valve closed
2/15/2010	2:54:09 PM	Bypass valve closed
2/15/2010	2:54:09 PM	H2 valve opened
2/15/2010	2:54:09 PM	Bubbler valve opened
2/15/2010	2:54:09 PM	Helium MFC set to  0.000000
2/15/2010	2:54:09 PM	H2 MFC set to  500.000000
2/15/2010	2:54:09 PM	BCl3 MFC set to  0.000000
2/15/2010	2:54:09 PM	SiCl4 MFC set to  0.000000
2/15/2010	2:54:09 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	2:54:09 PM	Tube furnace set to 0
2/15/2010	2:54:09 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	3:07:46 PM	Run aborted at 3:07 PM
2/15/2010	3:08:03 PM	H2 MFC set to  500.000000
2/15/2010	3:08:19 PM	Bubbler valve closed
2/15/2010	3:08:23 PM	H2 MFC set to  0.000000
2/15/2010	3:08:24 PM	H2 valve closed
2/15/2010	3:08:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	3:08:42 PM	Helium valve closed
2/15/2010	3:08:42 PM	H2 valve closed
2/15/2010	3:08:42 PM	BCl3 valve closed
2/15/2010	3:08:42 PM	PH3 valve closed
2/15/2010	3:08:42 PM	SiCl4 pre valve closed
2/15/2010	3:08:42 PM	SiCl4 post valve closed
2/15/2010	3:08:42 PM	Main Vac valve closed
2/15/2010	3:08:42 PM	Bubbler valve closed
2/15/2010	3:08:42 PM	Bypass valve opened
2/15/2010	3:08:42 PM	Helium MFC set to  0.000000
2/15/2010	3:08:42 PM	H2 MFC set to  0.000000
2/15/2010	3:08:42 PM	BCl3 MFC set to  0.000000
2/15/2010	3:08:42 PM	SiCl4 MFC set to  0.000000
2/15/2010	3:08:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	3:08:42 PM	Tube furnace set to 0
2/15/2010	3:08:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	3:08:55 PM	Helium valve closed
2/15/2010	3:08:55 PM	H2 valve closed
2/15/2010	3:08:55 PM	BCl3 valve closed
2/15/2010	3:08:55 PM	PH3 valve closed
2/15/2010	3:08:55 PM	SiCl4 pre valve closed
2/15/2010	3:08:55 PM	SiCl4 post valve closed
2/15/2010	3:08:55 PM	Bubbler valve closed
2/15/2010	3:08:55 PM	Main Vac valve opened
2/15/2010	3:08:55 PM	Bypass valve opened
2/15/2010	3:08:55 PM	Helium MFC set to  0.000000
2/15/2010	3:08:55 PM	H2 MFC set to  0.000000
2/15/2010	3:08:55 PM	BCl3 MFC set to  0.000000
2/15/2010	3:08:55 PM	SiCl4 MFC set to  0.000000
2/15/2010	3:08:55 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	3:08:55 PM	Tube furnace set to 0
2/15/2010	3:08:55 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	3:08:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	3:09:07 PM	Recipe started at 3:09 PM
2/15/2010	3:09:07 PM	Helium valve closed
2/15/2010	3:09:07 PM	BCl3 valve closed
2/15/2010	3:09:07 PM	PH3 valve closed
2/15/2010	3:09:07 PM	SiCl4 pre valve closed
2/15/2010	3:09:07 PM	SiCl4 post valve closed
2/15/2010	3:09:07 PM	Main Vac valve closed
2/15/2010	3:09:07 PM	Bypass valve closed
2/15/2010	3:09:07 PM	Bubbler valve closed
2/15/2010	3:09:07 PM	H2 valve opened
2/15/2010	3:09:07 PM	Helium MFC set to  0.000000
2/15/2010	3:09:07 PM	H2 MFC set to  500.000000
2/15/2010	3:09:07 PM	BCl3 MFC set to  0.000000
2/15/2010	3:09:07 PM	SiCl4 MFC set to  0.000000
2/15/2010	3:09:07 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	3:09:07 PM	Tube furnace set to 0
2/15/2010	3:09:07 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	3:10:28 PM	Helium valve closed
2/15/2010	3:10:28 PM	BCl3 valve closed
2/15/2010	3:10:28 PM	PH3 valve closed
2/15/2010	3:10:28 PM	SiCl4 pre valve closed
2/15/2010	3:10:28 PM	SiCl4 post valve closed
2/15/2010	3:10:28 PM	Main Vac valve closed
2/15/2010	3:10:28 PM	Bypass valve closed
2/15/2010	3:10:28 PM	H2 valve opened
2/15/2010	3:10:28 PM	Bubbler valve opened
2/15/2010	3:10:28 PM	Helium MFC set to  0.000000
2/15/2010	3:10:28 PM	H2 MFC set to  500.000000
2/15/2010	3:10:28 PM	BCl3 MFC set to  0.000000
2/15/2010	3:10:28 PM	SiCl4 MFC set to  0.000000
2/15/2010	3:10:28 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	3:10:28 PM	Tube furnace set to 0
2/15/2010	3:10:28 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	3:30:29 PM	Helium valve closed
2/15/2010	3:30:29 PM	BCl3 valve closed
2/15/2010	3:30:29 PM	PH3 valve closed
2/15/2010	3:30:29 PM	Main Vac valve closed
2/15/2010	3:30:29 PM	Bypass valve closed
2/15/2010	3:30:29 PM	H2 valve opened
2/15/2010	3:30:29 PM	SiCl4 pre valve opened
2/15/2010	3:30:29 PM	SiCl4 post valve opened
2/15/2010	3:30:29 PM	Bubbler valve opened
2/15/2010	3:30:29 PM	Helium MFC set to  0.000000
2/15/2010	3:30:29 PM	H2 MFC set to  500.000000
2/15/2010	3:30:29 PM	BCl3 MFC set to  0.000000
2/15/2010	3:30:29 PM	SiCl4 MFC set to  325.000000
2/15/2010	3:30:29 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	3:30:29 PM	Tube furnace set to 0
2/15/2010	3:30:29 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	3:50:29 PM	H2 valve closed
2/15/2010	3:50:29 PM	BCl3 valve closed
2/15/2010	3:50:29 PM	PH3 valve closed
2/15/2010	3:50:29 PM	SiCl4 pre valve closed
2/15/2010	3:50:29 PM	SiCl4 post valve closed
2/15/2010	3:50:29 PM	Main Vac valve closed
2/15/2010	3:50:29 PM	Bypass valve closed
2/15/2010	3:50:29 PM	Helium valve opened
2/15/2010	3:50:29 PM	Bubbler valve opened
2/15/2010	3:50:29 PM	Helium MFC set to  500.000000
2/15/2010	3:50:29 PM	H2 MFC set to  0.000000
2/15/2010	3:50:29 PM	BCl3 MFC set to  0.000000
2/15/2010	3:50:29 PM	SiCl4 MFC set to  0.000000
2/15/2010	3:50:29 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	3:50:29 PM	Tube furnace set to 0
2/15/2010	3:50:29 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	4:10:30 PM	Helium valve closed
2/15/2010	4:10:30 PM	H2 valve closed
2/15/2010	4:10:30 PM	BCl3 valve closed
2/15/2010	4:10:30 PM	PH3 valve closed
2/15/2010	4:10:30 PM	SiCl4 pre valve closed
2/15/2010	4:10:30 PM	SiCl4 post valve closed
2/15/2010	4:10:30 PM	Main Vac valve closed
2/15/2010	4:10:30 PM	Bypass valve closed
2/15/2010	4:10:30 PM	Bubbler valve closed
2/15/2010	4:10:30 PM	Helium MFC set to  0.000000
2/15/2010	4:10:30 PM	H2 MFC set to  0.000000
2/15/2010	4:10:30 PM	BCl3 MFC set to  0.000000
2/15/2010	4:10:30 PM	SiCl4 MFC set to  0.000000
2/15/2010	4:10:30 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	4:10:30 PM	Tube furnace set to 0
2/15/2010	4:10:30 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	4:10:30 PM	Run finished at 4:10 PM
2/15/2010	4:30:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	4:30:06 PM	Helium valve closed
2/15/2010	4:30:06 PM	H2 valve closed
2/15/2010	4:30:06 PM	BCl3 valve closed
2/15/2010	4:30:06 PM	PH3 valve closed
2/15/2010	4:30:06 PM	SiCl4 pre valve closed
2/15/2010	4:30:06 PM	SiCl4 post valve closed
2/15/2010	4:30:06 PM	Main Vac valve closed
2/15/2010	4:30:06 PM	Bubbler valve closed
2/15/2010	4:30:06 PM	Bypass valve opened
2/15/2010	4:30:06 PM	Helium MFC set to  0.000000
2/15/2010	4:30:06 PM	H2 MFC set to  0.000000
2/15/2010	4:30:06 PM	BCl3 MFC set to  0.000000
2/15/2010	4:30:06 PM	SiCl4 MFC set to  0.000000
2/15/2010	4:30:06 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	4:30:06 PM	Tube furnace set to 0
2/15/2010	4:30:06 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	4:30:36 PM	Helium valve closed
2/15/2010	4:30:36 PM	H2 valve closed
2/15/2010	4:30:36 PM	BCl3 valve closed
2/15/2010	4:30:36 PM	PH3 valve closed
2/15/2010	4:30:36 PM	SiCl4 pre valve closed
2/15/2010	4:30:36 PM	SiCl4 post valve closed
2/15/2010	4:30:36 PM	Bubbler valve closed
2/15/2010	4:30:36 PM	Main Vac valve opened
2/15/2010	4:30:36 PM	Bypass valve opened
2/15/2010	4:30:36 PM	Helium MFC set to  0.000000
2/15/2010	4:30:36 PM	H2 MFC set to  0.000000
2/15/2010	4:30:36 PM	BCl3 MFC set to  0.000000
2/15/2010	4:30:36 PM	SiCl4 MFC set to  0.000000
2/15/2010	4:30:36 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	4:30:36 PM	Tube furnace set to 0
2/15/2010	4:30:36 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	4:30:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	6:15:59 PM	Main Vac valve closed
2/15/2010	6:16:01 PM	Bypass valve closed
2/15/2010	6:16:18 PM	Bypass valve opened
2/15/2010	6:16:19 PM	Main Vac valve opened
2/15/2010	6:17:05 PM	Main Vac valve closed
2/15/2010	6:17:24 PM	Bypass valve closed
2/15/2010	6:17:36 PM	H2 MFC set to  500.000000
2/15/2010	6:17:37 PM	H2 valve opened
2/15/2010	6:18:58 PM	Bubbler valve opened
2/15/2010	6:38:19 PM	Helium MFC set to  300.000000
2/15/2010	6:38:23 PM	Helium valve opened
2/15/2010	6:38:26 PM	H2 MFC set to  0.000000
2/15/2010	6:38:27 PM	H2 valve closed
2/15/2010	6:39:03 PM	Helium MFC set to  400.000000
2/15/2010	6:44:43 PM	Bubbler valve closed
2/15/2010	6:44:43 PM	Helium valve closed
2/15/2010	6:44:46 PM	Helium MFC set to  0.000000
2/15/2010	6:44:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	6:44:57 PM	Helium valve closed
2/15/2010	6:44:57 PM	H2 valve closed
2/15/2010	6:44:57 PM	BCl3 valve closed
2/15/2010	6:44:57 PM	PH3 valve closed
2/15/2010	6:44:57 PM	SiCl4 pre valve closed
2/15/2010	6:44:57 PM	SiCl4 post valve closed
2/15/2010	6:44:57 PM	Main Vac valve closed
2/15/2010	6:44:57 PM	Bubbler valve closed
2/15/2010	6:44:57 PM	Bypass valve opened
2/15/2010	6:44:57 PM	Helium MFC set to  0.000000
2/15/2010	6:44:57 PM	H2 MFC set to  0.000000
2/15/2010	6:44:57 PM	BCl3 MFC set to  0.000000
2/15/2010	6:44:57 PM	SiCl4 MFC set to  0.000000
2/15/2010	6:44:57 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	6:44:57 PM	Tube furnace set to 0
2/15/2010	6:44:57 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	6:45:15 PM	Helium valve closed
2/15/2010	6:45:15 PM	H2 valve closed
2/15/2010	6:45:15 PM	BCl3 valve closed
2/15/2010	6:45:15 PM	PH3 valve closed
2/15/2010	6:45:15 PM	SiCl4 pre valve closed
2/15/2010	6:45:15 PM	SiCl4 post valve closed
2/15/2010	6:45:15 PM	Bubbler valve closed
2/15/2010	6:45:15 PM	Main Vac valve opened
2/15/2010	6:45:15 PM	Bypass valve opened
2/15/2010	6:45:15 PM	Helium MFC set to  0.000000
2/15/2010	6:45:15 PM	H2 MFC set to  0.000000
2/15/2010	6:45:15 PM	BCl3 MFC set to  0.000000
2/15/2010	6:45:15 PM	SiCl4 MFC set to  0.000000
2/15/2010	6:45:15 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	6:45:15 PM	Tube furnace set to 0
2/15/2010	6:45:15 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	6:45:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	6:45:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2010	6:45:19 PM	H2 valve closed
2/15/2010	6:45:19 PM	BCl3 valve closed
2/15/2010	6:45:19 PM	PH3 valve closed
2/15/2010	6:45:19 PM	SiCl4 pre valve closed
2/15/2010	6:45:19 PM	SiCl4 post valve closed
2/15/2010	6:45:19 PM	Main Vac valve closed
2/15/2010	6:45:19 PM	Bypass valve closed
2/15/2010	6:45:19 PM	Bubbler valve closed
2/15/2010	6:45:19 PM	Helium valve opened
2/15/2010	6:45:19 PM	Helium MFC set to  500.000000
2/15/2010	6:45:19 PM	H2 MFC set to  0.000000
2/15/2010	6:45:19 PM	BCl3 MFC set to  0.000000
2/15/2010	6:45:19 PM	SiCl4 MFC set to  0.000000
2/15/2010	6:45:19 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	6:45:19 PM	Tube furnace set to 0
2/15/2010	6:45:19 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	6:46:35 PM	Helium valve closed
2/15/2010	6:46:35 PM	H2 valve closed
2/15/2010	6:46:35 PM	BCl3 valve closed
2/15/2010	6:46:35 PM	PH3 valve closed
2/15/2010	6:46:35 PM	SiCl4 pre valve closed
2/15/2010	6:46:35 PM	SiCl4 post valve closed
2/15/2010	6:46:35 PM	Main Vac valve closed
2/15/2010	6:46:35 PM	Bypass valve closed
2/15/2010	6:46:35 PM	Bubbler valve closed
2/15/2010	6:46:35 PM	Helium MFC set to  0.000000
2/15/2010	6:46:35 PM	H2 MFC set to  0.000000
2/15/2010	6:46:35 PM	BCl3 MFC set to  0.000000
2/15/2010	6:46:35 PM	SiCl4 MFC set to  0.000000
2/15/2010	6:46:35 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	6:46:35 PM	Tube furnace set to 0
2/15/2010	6:46:35 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	6:46:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2010	6:50:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2010	6:50:02 PM	Helium valve closed
2/15/2010	6:50:02 PM	H2 valve closed
2/15/2010	6:50:02 PM	BCl3 valve closed
2/15/2010	6:50:02 PM	PH3 valve closed
2/15/2010	6:50:02 PM	SiCl4 pre valve closed
2/15/2010	6:50:02 PM	SiCl4 post valve closed
2/15/2010	6:50:02 PM	Main Vac valve closed
2/15/2010	6:50:02 PM	Bubbler valve closed
2/15/2010	6:50:02 PM	Bypass valve opened
2/15/2010	6:50:02 PM	Helium MFC set to  0.000000
2/15/2010	6:50:02 PM	H2 MFC set to  0.000000
2/15/2010	6:50:02 PM	BCl3 MFC set to  0.000000
2/15/2010	6:50:02 PM	SiCl4 MFC set to  0.000000
2/15/2010	6:50:02 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	6:50:02 PM	Tube furnace set to 0
2/15/2010	6:50:02 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	6:50:27 PM	Helium valve closed
2/15/2010	6:50:27 PM	H2 valve closed
2/15/2010	6:50:27 PM	BCl3 valve closed
2/15/2010	6:50:27 PM	PH3 valve closed
2/15/2010	6:50:27 PM	SiCl4 pre valve closed
2/15/2010	6:50:27 PM	SiCl4 post valve closed
2/15/2010	6:50:27 PM	Bubbler valve closed
2/15/2010	6:50:27 PM	Main Vac valve opened
2/15/2010	6:50:27 PM	Bypass valve opened
2/15/2010	6:50:27 PM	Helium MFC set to  0.000000
2/15/2010	6:50:27 PM	H2 MFC set to  0.000000
2/15/2010	6:50:27 PM	BCl3 MFC set to  0.000000
2/15/2010	6:50:27 PM	SiCl4 MFC set to  0.000000
2/15/2010	6:50:27 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	6:50:27 PM	Tube furnace set to 0
2/15/2010	6:50:27 PM	Bypass solenoid MFC set to  0.000000
2/15/2010	6:50:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
